BE589A

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BE589A - Fabrication Techniques for Micro- and Nanodevices

Aerospace & Mechanical EngrGraduateUA - UA General

Course ID

005543

Course Description

This course tackles the techniques for the design, fabrication, and testing of traditional microelectromechanical systems (MEMS) and nanodevices. Each student will be required to participate in weekly laboratory sessions, to keep a laboratory notebook, and to submit a project report (25% Honors final grade;15% Undergraduate final grade) focusing on the design, fabrication, and testing of a MEMS device. Honors students receive additional homework assignments typically involving derivation or proof of a theory presented in class. Additionally, Honors students are asked to complete an independent MEMS/NEMS design, while undergraduates can use an existing device design. Grading differences are reflected in the syllabus. Graduate-level requirements include additional homework assignments typically involving derivation or proof of a theory presented in class. Additionally, graduate students are asked to complete an independent MEMS/NEMS design, while undergraduates can use an existing device design. Grading differences are reflected in the syllabus.

Min Units

3

Max Units

3

Repeatable for Credit

No

Grading Basis

GRD - Regular Grades A, B, C, D, E

Career

Graduate

Course Attributes

CE - CL (Cross Listed)

Cross Listed Courses

Component

Laboratory

Optional Component

Yes

Component

Lecture

Optional Component

No