MSE547L
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MSE547L - Semiconductor Processing Laboratory
Course ID
038030
Course Description
The objective of the course is to teach five different unit operations that are relevant to the fabrication of semiconductor devices. The unit operations that will be covered are: Thermal Oxidation, Lithography, Deposition, Plasma Etching, and Surface Preparation (Cleaning and Wet Etching). Graduate students will be required to analyze the data at a greater depth, interpret the results and fit the data to mathematical models.
Min Units
2
Max Units
2
Repeatable for Credit
No
Grading Basis
GRD - Regular Grades A, B, C, D, E
Career
Graduate
Component
Laboratory
Optional Component
No