MSE505
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MSE505 - Fundamentals of Chemical Mechanical Planarization
Course ID
043721
Course Description
This course will introduce the basic concepts of chemical mechanical planarization and discuss and teach in detail the materials, processes and equipment involved in this advanced technology. The course will also review the myriad metrology methods that are used for analyzing polishing outcomes.
Min Units
1
Max Units
1
Repeatable for Credit
No
Grading Basis
GRD - Regular Grades A, B, C, D, E
Career
Graduate
May be convened with
MSE405
Component
Lecture
Optional Component
No